Soo, Mun Teng and Prastomo, Niki and Matsuda, Atsunori and Kawamura, Go and Muto, Hiroyuki and Noor, Ahmad Fauzi Mohd and Lockman, Zainovia and Cheong, Kuan Yew (2012) Elaboration and characterization of sol–gel derived ZrO2 thin films treated with hot water. Applied Surface Science, 258 (13). pp. 5250-5258. ISSN 1873-5584
Full text not available from this repository.Abstract
We describe the preparation and characterization of zirconia (ZrO2) thin films via sol–gel route by spin-coating method. By utilizing alkoxides Zr[O(CH2)3CH3]4 in the presence of ethanol (EtOH), nitric acid and acetylacetone as a chelating agent, a stable sol of ZrO2 was obtained. Smooth surface morphology with nano-cracks was exhibited for all ZrO2 thin films being fabricated. The film thickness varied from 39 to 206 nm depending on the molar ratio of EtOH during the sol preparation and also annealing temperature applied. All ZrO2 films possess high optical transmittance. Refractive index of the thin film was ranging from 1.6 to 2.4 depending on molar ratio of EtOH and annealing temperature. Tetragonal phase of ZrO2 was formed after annealed at 400 °C. Crystallinity of ZrO2 was enhanced by increasing molar ratio of EtOH. Crystallite size of tetragonal ZrO2 was ranged from 3.0 to 9.9 nm. A hot-water treatment reduced the film thickness and further improved crystallinity of the sol–gel derived oxide.
| Item Type: | Article |
|---|---|
| Keywords: | Zirconia (ZrO2); Thin film; Ethanol solvent; Thickness; Refractive index; Sol–gel |
| Subjects: | 500 Science and Mathematic > 500 Science > 507 Education, Research, Related Topics 500 Science and Mathematic > 540 Chemistry |
| Divisions: | Faculty of Engineering & Informatics > Engineering Physics |
| Depositing User: | Administrator UMN Library |
| Date Deposited: | 09 Dec 2021 16:35 |
| Last Modified: | 27 Jan 2022 03:29 |
| URI: | https://kc.umn.ac.id/id/eprint/19438 |
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