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Fabrication of Bistable Prestressed Curved-Beam

Pane, Ivransa Zuhdi and Asano, Tanemasa (2007) Fabrication of Bistable Prestressed Curved-Beam. 2007 Digest of papers Microprocesses and Nanotechnology.

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Official URL: https://ieeexplore.ieee.org/abstract/document/4456...

Abstract

Bistable curved-beams are micro electro mechanical systems (MEMS) that can switch over two stable bending states and maintain these states without consuming power. One of the most attractive applications of these structures is memory devices. A prestressed curved-beam of single crystal Si is fabricated through the sequences of the standard CMOS process using SOI. The theoretical analysis procedure for the bistable operation is established. The miniaturized bistable curved-beam is applied to memory devices.

Item Type: Article
Subjects: 500 Science and Mathematic > 530 Physics > 531 Classical Mechanics
500 Science and Mathematic > 530 Physics > 539 Modern Physics
Divisions: Fakultas Teknik Informatika > Program Studi Informatika
Depositing User: mr admin umn
Date Deposited: 05 Oct 2021 04:31
Last Modified: 05 Oct 2021 04:31
URI: http://kc.umn.ac.id/id/eprint/18510

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