Investigation of intermixing in TiAlN/VN nanoscale multilayer coatings by energy-filtered TEM

Meidia, Hira and Cullis, Anthony G. and Schönjahn, Cornelia and Münz, Wolf Dieter and Rodenburg, John Marius (2002) Investigation of intermixing in TiAlN/VN nanoscale multilayer coatings by energy-filtered TEM. Surface and Coatings Technology, 151. pp. 209-213. ISSN 0257-8972

Full text not available from this repository.

Abstract

We employ high-resolution energy-filtered cross-sectional transmission electron microscopy (EFTEM) to estimate the degree of layer intermixing in a TiAlN/VN low friction, wear-resistant nanoscale multilayers with a periodicity of approximately 4 nm grown by industrial-scale unbalanced magnetron ion-assisted PVD. Coatings are examined by high-resolution TEM imaging. A series of high-resolution elemental distribution maps are obtained by tuning the electron energy-loss imaging filter to the core loss energies of the elements present. We compare the experimental composition profiles with calculations, which model intermixing at the interface of the layers by a convolution. Although no physical shutter is employed in the industrial process (the substrate is passed in front of alternating targets in a confined plasma), the resulting layers are well differentiated.

Item Type: Article
Uncontrolled Keywords: PVD; TiAlN/VN; Superlattice; Intermixing; EELS
Subjects: 500 Science and Mathematic > 530 Physics
Divisions: Fakultas Teknik Informatika > Program Studi Teknik Komputer
Depositing User: mr admin umn
Date Deposited: 06 Dec 2021 14:15
Last Modified: 27 Jan 2022 03:28
URI: http://kc.umn.ac.id/id/eprint/19362

Actions (login required)

View Item View Item